Active Vibration Suppression Measured Data (solid crystal)

Test 1: The motion axis was operated in the negative direction while measuring the vibration displacement, velocity, and acceleration of the test mechanism.

Test 2: Active vibration suppression compensation was applied to the mirror axis based on the motion axis, with a 20 mm separation between the two axis endpoints. The vibration displacement, velocity, and acceleration of the test mechanism were then measured.

The results demonstrate that the active vibration suppression system effectively reduces vibration across most operating conditions, with particularly significant improvements in vibration displacement and velocity. This can substantially improve the stability and positioning performance of the motion system, making the technology well suited to high-precision motion-control applications.

Only under the extreme operating condition of 1,500 mm/s and 1.5 G was a slight increase in vibration acceleration observed. In practical applications, the velocity and acceleration parameters should therefore be selected appropriately for the required operating conditions to avoid unfavorable combinations of extreme speed and acceleration.